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Transactions of the Institute of Systems, Control and Information Engineers Vol. 14 (2001), No. 7

ISIJ International
belloff
ONLINE ISSN: 2185-811X
PRINT ISSN: 1342-5668
Publisher: THE INSTITUTE OF SYSTEMS, CONTROL AND INFORMATION ENGINEERS (ISCIE)

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Transactions of the Institute of Systems, Control and Information Engineers Vol. 14 (2001), No. 7

Multivariable System Identification Experiments for Semiconductor Exposure Apparatus Supported by Anti-Vibration Units Using Subspace Method

Hiroyuki TAKANASHI, Hiroaki KATO, Atsushi TOUKAIRIN, Takehiko MAYAMA, Shinji WAKUI, Shuichi ADACHI

pp. 339-346

DOI:

10.5687/iscie.14.339

Abstract

In this paper, multi-degrees-of-freedom (multi-DOF) system identification of semiconductor exposure apparatus supported by anti-vibration units is discussed. To meet nanometer order semiconductor lithography demands for alignment accuracy, vibration control is one of the most important technologies in the semiconductor exposure apparatus supported by anti-vibration units. A dynamical model of the plant is necessary in order to design the microvibration controller and to evaluate the performance of the control systems. The controlled object is essentially a multivariable system, because the plant has 6-DOF motional modes. All the DOF of the plant are simultaneously excited and the multi-DOF dynamical model is identified from the exciting signals and the vibration output signals. The model is practically constructed in a short time using subspace method in system identification theory. Identification results are evaluated through experimental data in comparison with a conventional frequency response method.

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Multivariable System Identification Experiments for Semiconductor Exposure Apparatus Supported by Anti-Vibration Units Using Subspace Method

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Ris

A Unified Computational Approach to Nonlinear Optimal Control Problems

Joe IMAE, Kazuhiro INOUE

pp. 347-356

DOI:

10.5687/iscie.14.347

Abstract

There are many kinds of nonlinear optimal control problems, such as constrained/unconstrained problems, free/fixed terminal-time problems, parameter dependent/independent problems, and so on. It is said that those optimal conrtol problems, especially free-terminal-time, parameter-dependent, and initial-state-constraint ones, are very difficult to slove numerically. In this paper, based on a new idea, we present a unified computational approach that is applicable to those optimal conrtol problems. We demonstrate the effectiveness of our approach through some numerical simulations, includng time-optimal control problems, and a singular control problem.

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A Unified Computational Approach to Nonlinear Optimal Control Problems

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Ris

Attitude Control of Legged Robot Emu on a Slope with Unknown Slope Angle

Koichi OSUKA

pp. 357-363

DOI:

10.5687/iscie.14.357

Abstract

In this paper, we discuss motion control of legged robot Emu which is set on a slope whose slope angle is not known exactly. According to the stability analysis, we found that the control system proposed by us has a property of parametric stability. At the same time, we found that there is a certain problem. Therefore, to overcome the problem, we propose a new control law based on nonlinear observer.

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Attitude Control of Legged Robot Emu on a Slope with Unknown Slope Angle

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A Fuzzy Classifier with Polyhedral Regions

Takafumi SHIMOZAKI, Tomoo TAKIGAWA, Shigeo ABE

pp. 364-371

DOI:

10.5687/iscie.14.364

Abstract

In this paper, we discuss a fuzzy classifier with polyhedral regions. First, we generate an initial convex hull of the maximum dimension using the data, included in a class, in the general positions. Next, we modify the convex hull using one training datum at a time by the dynamic convex hull generation method. Finally, for each convex hull we define a membership function using the minimum operator. We demonstrate the effectiveness of our method using iris and thyroid data sets.

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A Fuzzy Classifier with Polyhedral Regions

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Robust Function Approximation Using Ellipsoidal Fuzzy Rules

Hiroyasu KUBOTA, Shigeo ABE

pp. 372-378

DOI:

10.5687/iscie.14.372

Abstract

This paper discusses robust function approximation when the Takagi-Sugeno type model is used for the consequent part of fuzzy rules. With this model, the parameters of the linear equation that defines the output value of the fuzzy rule are determined by the least-squares method. Therefore, if the training data include outliers, the method fails to determine the parameter values correctly. To overcome this problem we use the least-median-of-squares method. Among the original training data set, we randomly select training data more than the number of parameters, and determine the parameter values using the least-squares method. We repeat this many times and determine the parameters with the smallest median of squared errors. We compare the proposed method with the least-squares method and the conventional least-median-of-squares method using the data generated by the Mackey-Glass differential equation.

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Robust Function Approximation Using Ellipsoidal Fuzzy Rules

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